Precision slurry blending and controlled distribution

 

Exentec is a global leader in precision-engineered slurry systems and integrated process equipment—trusted across the semiconductor, CMP, solar, and advanced materials industries. Whether you're operating a low-volume pilot line or a high-volume production facility, Exentec delivers scalable, field-proven solutions tailored to meet your slurry process demands at any capacity. 

 

At the core of Exentec’s technology is our expertise in precise slurry blending and controlled distribution. Our systems are engineered to deliver accurate and repeatable slurry mixtures while maintaining optimal flow characteristics to each point of use. This ensures consistent material performance, reduces waste, and enhances tool uptime - key factors in achieving superior CMP results. 

 
Supported by a portfolio of patents and decades of engineering excellence, Exentec’s solutions are purpose-built to handle the complexities of modern CMP processes. With deep process knowledge, advanced automation, and continuous R&D investment, we develop slurry systems that solve today’s challenges and scale for tomorrow’s demands - ensuring quality and performance every step of the way. 

 

Exentec Slurry Systems offer advantages for low to high-volume operations

 

  • Scalable slurry systems configured for 1 to 8+ dispense channels and variable make-up rates 
  • Stable pressure control with minimal fluctuation during blending and distribution 
  • Isolated station servicing for uninterrupted production during maintenance 
  • User-friendly interface with real-time monitoring and configurable settings 
  • Non-disruptive tank flushing and purging to maintain loop integrity 
     
Exentec Slurry Systems

MEGA®: Slurry Systems by Exentec

The Exentec MEGA® range of slurry systems is a market-leader with a strong track record of delivery to prestige clients in high-tech industries:

 

MEGA Dedicated Blending slurry system
MEGA® Blending Systems
MEGA® Blending Systems

Designed for total reliability and repeatability, MEGA® Blending Systems offer automated control, intelligent monitoring, and customizable tank capacities.

MegaLink Communications Slurry System
MEGA® Communications & Controls Systems
MEGA® Communications & Controls Systems

Designed for both standalone and SCADA-integrated environments, MegaLink 2 enables precise monitoring and control of distribution processes at the factory level.

MEGA Distribution slurry systems
MEGA® Distribution Systems
MEGA® Distribution Systems

MEGA® Distribution Systems are advanced, scalable solutions for blended slurry delivery in semiconductor and CMP applications

MEGA Dedicated Blending slurry system
MEGA® Blending Systems
MEGA® Blending Systems

Designed for total reliability and repeatability, MEGA® Blending Systems offer automated control, intelligent monitoring, and customizable tank capacities.