MEGA® Distribution Systems

The MEGA® SD1000 is purpose-built for the distribution of colloidal and fumed slurry to low- and mid-volume polisher lines. Each dispense channel is equipped with a dedicated: 

• Distribution tank
• Slurry pump
• Filtration unit
• Global loop circuit components 

Installed at the fab level, the SD1000 is optimized to deliver slurry to polishers within a 100-foot radius, maintaining point-of-use (POU) pressure between 20–30 psi for stable and efficient slurry flow. 

• Automated flush, purge, and drain of raw and blended slurry circuits
• Continuous tank recirculation to maintain slurry uniformity
• 15-gallon (56L) conical bottom tanks made of natural polypropylene (PP) Air and slurry tees with capacitive gas sensing to remove trapped air in global loops
• Integrated bubble-style humidifier with nitrogen (N₂) distribution for tank blanketing
• H₂O₂ monitoring in the dispense circuit
• Exhaust differential pressure switch/indicator
• Manual sampling ports for each slurry circuit 

• Advanced inline metrology sensors for pH, conductivity, density, large particle detection, and H₂O₂ concentration
• Redundant station components for increased reliability and uptime 

• Dependable Performance: Engineered for low- to mid-volume CMP slurry dispense, ensuring reliable operation and tool support
• Scalable Configuration: Modular design allows customization to support a specific number of global slurry loops—ideal for growing or changing fab environments
• Cost-Effective Design offers a low-cost footprint without sacrificing quality or performance, making it an economical choice for fabs and cleanrooms

• Semiconductor Manufacturing
• Post-CMP Processing
• Solar / Photovoltaics (PV)
• Low-Solids CMP Applications
• LED Production
• Silicon Carbide (SiC) / IoT Device Fabrication 

The MEGA® SD1000 is purpose-built for the distribution of colloidal and fumed slurry to low- and mid-volume polisher lines. Each dispense channel is equipped with a dedicated: 

• Distribution tank
• Slurry pump
• Filtration unit
• Global loop circuit components 

Installed at the fab level, the SD1000 is optimized to deliver slurry to polishers within a 100-foot radius, maintaining point-of-use (POU) pressure between 20–30 psi for stable and efficient slurry flow. 

• Automated flush, purge, and drain of raw and blended slurry circuits
• Continuous tank recirculation to maintain slurry uniformity
• 15-gallon (56L) conical bottom tanks made of natural polypropylene (PP) Air and slurry tees with capacitive gas sensing to remove trapped air in global loops
• Integrated bubble-style humidifier with nitrogen (N₂) distribution for tank blanketing
• H₂O₂ monitoring in the dispense circuit
• Exhaust differential pressure switch/indicator
• Manual sampling ports for each slurry circuit 

• Advanced inline metrology sensors for pH, conductivity, density, large particle detection, and H₂O₂ concentration
• Redundant station components for increased reliability and uptime