Designed for continuous slurry delivery
This advanced system supports automated N₂ blanketing and humidification, directly connected to the raw material supply containers based on application needs.
With automatic switchover capabilities, the MEGA® Transfer System ensures uninterrupted operation, maximizing equipment uptime and minimizing manual operator intervention—ideal for high-volume manufacturing environments.
Key Benefits of MEGA® Transfer Systems
Key Benefits of MEGA® Transfer Systems
- Flexible Installation
- Enables slurry transfer from a remote location, separated from the Slurry Blend/Distribution Unit (SBDU)
- Configurable Design
- Available in half-height and full-height models
- Optional day tank configurations to match output and process requirements
- Proven Reliability
- Field-tested in global semiconductor and CMP manufacturing environments
Industries served
Industries served
- Semiconductor Manufacturing
- Post-CMP Processing
- Solar / Photovoltaics (PV)
- Low-Solids CMP Applications
- LED Manufacturing
- Silicon Carbide (SiC) / IoT Applications
Key Benefits of MEGA® Transfer Systems
Key Benefits of MEGA® Transfer Systems
- Flexible Installation
- Enables slurry transfer from a remote location, separated from the Slurry Blend/Distribution Unit (SBDU)
- Configurable Design
- Available in half-height and full-height models
- Optional day tank configurations to match output and process requirements
- Proven Reliability
- Field-tested in global semiconductor and CMP manufacturing environments
Industries served
Industries served
- Semiconductor Manufacturing
- Post-CMP Processing
- Solar / Photovoltaics (PV)
- Low-Solids CMP Applications
- LED Manufacturing
- Silicon Carbide (SiC) / IoT Applications