Designed for legacy and next-gen applications
Engineered to meet the demanding requirements of semiconductor manufacturing CMP applications, and other high-purity chemical processes, these systems support a wide range of blend ratios and makeup rates—making it ideal for both legacy and next-generation applications.
Designed for total reliability and repeatability, MEGA® blending systems offer automated control, intelligent monitoring, and customizable tank capacities to meet the specific demands of each process environment.
Feature-rich engineering
Feature-rich engineering
- Precise blending support for a wide range of ratios and chemicals
- Total mixing capacities from 30 to 500 liters, depending on system configuration
- Automated flush, purge, and drain of raw material and blend circuits for maximum cleanliness
- Bubbler-style humidifier provides a nitrogen (N₂) blanket over the blend tank for purity protection
- Manual sampling ports for blend quality verification
Maximize the performance benefits
Maximize the performance benefits
- Exhaust monitoring for safety and process control
- Manual attenuation valve to control back-pressure in transfer loop return line
- Manual isolation, bypass, drain, and degassing capabilities for enhanced filter control
- Capacitive drum-empty sensors for uninterrupted material supply
- Pressure transducer for real-time monitoring of raw material supply pressure
Multi-facility applications
Multi-facility applications
- Semiconductor wafer fabrication
- Chemical Mechanical Planarization (CMP)
- Photovoltaic and microelectronic manufacturing
- Precision coatings and advanced material R&D
Feature-rich engineering
Feature-rich engineering
- Precise blending support for a wide range of ratios and chemicals
- Total mixing capacities from 30 to 500 liters, depending on system configuration
- Automated flush, purge, and drain of raw material and blend circuits for maximum cleanliness
- Bubbler-style humidifier provides a nitrogen (N₂) blanket over the blend tank for purity protection
- Manual sampling ports for blend quality verification