MEGA communications and control system
Highlighted features
Highlighted features
  • Touchscreen Human Machine Interface (HMI) for local control and monitoring
  • Controls up to 8 remote units per host system
  • Ethernet-based communication protocols
  • Redundant DC power standard on all systems
  • Supports handshake signaling between CDU and POU tools
  • Highly configurable software architecture
  • Compatible with diverse OEM toolsets and automation systems

chemical supply dosing system
Suitable applications
Suitable applications
  • CMP slurry distribution systems (small and large-scale fabs)
  • Global loop chemical supply systems 
  • Multi-point tool communication networks
  • Chemical or gas cabinet monitoring
  • Process control interface for legacy and modern tool integration 

chemical handling communications system
Key benefits
Key benefits
  • Scalable architecture supports expansion as production requirements grow
  • Compatible with multiple Ethernet-based protocols and legacy interfaces
  • Operates as a standalone PLC system or integrates easily into existing SCADA infrastructure
  • Redundant power, communications, and control logic improve uptime and operational security
  • Designed for CMP fabs, slurry systems, and chemical delivery across global loop networks

chemical handling communications system
Options
Options
  • Redundant AC power supply
  • Redundant communication links
  • Redundant Programmable Logic Controllers (PLCs) for failover protection