Cyclone XL
Cyclone XL
The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first abatement chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.
Beneficial Features
High Flow Capacity: Up to 5000slm flow capacity without loss of efficiency - more than 5 times most POU systems
Gas Inlet Devices: Ambient or high temperature gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
Packed Column: The final polish. Packing requires no maintenance or replacement
Second and Third Abatement Chambers: Eleven fine spray, high velocity nozzles ensure effective removal of impurities
First Abatement Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities
Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam. Three flow stages to match process parameters
Pump: Corrosion resistant, high-output and long life. Recirculates 25GPM
Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use
Small Footprint: 47.2 inches by 53.35 inches
Inlet Types
Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger can reduce your system related downtown to zero
Poly Etch CVD Inlet: Highly efficient gas abatement with patented gas inlet devices that minimize restrictions
High-Temperature Inlet: For high temperature gas stream up to 220ºC
Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months
Inlet Configurations
Standard Epitaxial: Only 1 port for Epitaxial and Cyclone, 2 inch PVC slip fit
Standard 1-to-4 port non-heated Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters
Standard XL: 2 ports only, unheated only, KF 80, SS
Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange
To speak with us about our gas abatement solutions: +1 408.573.0701
Beneficial Features
High Flow Capacity: Up to 5000slm flow capacity without loss of efficiency - more than 5 times most POU systems
Gas Inlet Devices: Ambient or high temperature gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
Packed Column: The final polish. Packing requires no maintenance or replacement
Second and Third Abatement Chambers: Eleven fine spray, high velocity nozzles ensure effective removal of impurities
First Abatement Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities
Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam. Three flow stages to match process parameters
Pump: Corrosion resistant, high-output and long life. Recirculates 25GPM
Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use
Small Footprint: 47.2 inches by 53.35 inches
Inlet Types
Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger can reduce your system related downtown to zero
Poly Etch CVD Inlet: Highly efficient gas abatement with patented gas inlet devices that minimize restrictions
High-Temperature Inlet: For high temperature gas stream up to 220ºC
Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months
Inlet Configurations
Standard Epitaxial: Only 1 port for Epitaxial and Cyclone, 2 inch PVC slip fit
Standard 1-to-4 port non-heated Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters
Standard XL: 2 ports only, unheated only, KF 80, SS
Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange
To speak with us about our gas abatement solutions: +1 408.573.0701
Encompass
Leveraging our unique value proposition in wet abatement, Exentec has introduced Encompass, our first thermal product line.
Cyclone XL
The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities.