Modular slurry filtration systems
The MEGA® SF Series Filtration Systems are modular, standalone slurry filtration systems engineered for continuous, Low to high-volume process filtration. Ideal for semiconductor fabs, CMP applications, and other high-tech manufacturing environments, the SF Series supports full loop integration or Point-of-Use (POU) tool filtration with unmatched reliability and flexibility.
The MEGA® Filter Cart is a mobile slurry filtration unit designed for R&D environments, pilot lines, and localized Point-of-Use tool filtration. With its flexible cartridge or capsule format, it supports both temporary and long-term slurry filtration requirements.
Key benefits of the MEGA® SF series
Key benefits of the MEGA® SF series
- Uninterrupted Filtration Multiple parallel filter banks ensure continuous slurry flow during filter change-outs and system flushes
- Modular & Configurable Supports series and/or parallel filtration setups, enabling scalable integration across production lines or R&D labs
- Compact Footprint Space-saving design fits easily into cleanroom and fab environments, including cabinet-style versions for tighter areas
- Redundancy & Bypass Support Maintains global loop flow during maintenance or filter replacement, preventing process downtime
MEGA® SF series suitable applications
MEGA® SF series suitable applications
- Semiconductor manufacturing
- Post-CMP slurry filtration
- Solar and photovoltaic (PV) production
- LED manufacturing
- Silicon Carbide (SiC) and IoT device processing
- Low-solids CMP processes
- Advanced materials R&D
MEGA® Filter Cart at a glance
MEGA® Filter Cart at a glance
- Supports 2–3 parallel filter banks with 20" filter bowl/head assemblies
- Optional cabinet configuration with 10" bowl/head assemblies
- Auto flush and purge for each bank to maintain flow integrity
- Automatic de-airing and pre-press functions for seamless transitions
- Differential pressure detection, alarms, and monitoring
- Degassing capabilities to reduce bubble contamination
- Designed for control via SBD or CBD unit
MEGA® Filter Cart benefits
MEGA® Filter Cart benefits
- Portable and compact design for easy mobility and tool integration
- Flexible filter media options: supports standard cartridges or capsules
- Sample ports for both input and output, ideal for process development
- Built-in safety with pressure monitoring, flow meters, and wheel locking
- Perfect for R&D or temporary deployment in full-production fabs
- Quick setup and minimal space requirements