Precision slurry blending and controlled distribution
Exentec is a global leader in precision-engineered slurry systems and integrated process equipment—trusted across the semiconductor, CMP, solar, and advanced materials industries. Whether you're operating a low-volume pilot line or a high-volume production facility, Exentec delivers scalable, field-proven solutions tailored to meet your slurry process demands at any capacity.
At the core of Exentec’s technology is our expertise in precise slurry blending and controlled distribution. Our systems are engineered to deliver accurate and repeatable slurry mixtures while maintaining optimal flow characteristics to each point of use. This ensures consistent material performance, reduces waste, and enhances tool uptime - key factors in achieving superior CMP results.
Exentec Slurry Systems offer advantages for low to high-volume operations
- Scalable slurry systems configured for 1 to 8+ dispense channels and variable make-up rates
- Stable pressure control with minimal fluctuation during blending and distribution
- Isolated station servicing for uninterrupted production during maintenance
- User-friendly interface with real-time monitoring and configurable settings
- Non-disruptive tank flushing and purging to maintain loop integrity
MEGA Blending Systems
Designed for total reliability and repeatability, MEGA® blending systems offer automated control, intelligent monitoring, and customizable tank capacities
MEGA® Communications & Controls Systems
Designed for both standalone and SCADA-integrated environments, MegaLink 2 enables precise monitoring and control of distribution processes at the factory level.
MEGA Distribution Systems
MEGA® Distribution Systems are advanced, scalable solutions for blended slurry delivery in semiconductor and CMP applications
MEGA Filtration Systems
The MEGA® SF Series Filtration Systems are modular, standalone slurry filtration systems
MEGA Metrology Systems
MEGA® Metrology Systems deliver precision measurement and monitoring solutions for slurry and chemical processes
MEGA Multi-Function Systems
MEGA®’s multi-function blend and distribution systems offer a powerful, integrated solution for precision slurry blending and point-of-use slurry distribution
MEGA Transfer System
The MEGA® Transfer System is a flexible, reliable solution engineered to deliver raw slurry from one or multiple drums or totes