Cooling Water Cabinets

Cooling Water Cabinets

Usage of ultra-pure-water (UPW) in the tool circuit.

Environmental Control Chamber

Precise Environmental Chamber

Precise environmental chamber for controlled process environments.
 

Climate Control System

Precision Climate-Control System

The right climate ensures quality and reduces the rejection rate in production. 
Dew Point Control System

Dew Point Control Solution

System solution for the dew point control of critical humidity production.

Ultrapure Water Conditioning device image

Ultrapure Water Conditioning

Precise conditioning of fluid media at innovative production environments.

cleanroom employees at work image
Cleanroom

Superior solutions and comprehensive services

mini environments image
Mini Environments
air handling unit
Air Handling Units
critical-subsystems-and-controlled-environments-hero-image-dark2
Critical Subsystems and Controlled Environments
High Purity Gas Supply-Systems
Gas Supply
chemical supply machinery
Chemical Supply

Ultra-high purity chemical & slurry blending and distribution systems

liquid level sensor image
Ampoules and Sensors
process exhaust ductwork, piping and supports
Process Exhaust