Ammonium Hydroxide Generation

High Purity Chemical Systems

Exentec offers equipment, field support service and technical expertise to meet various application needs of high purity fluid delivery, chemical blending and state-of-the-art CMP slurry systems for semiconductor manufacturing and other high-tech industries.

chemical supply

Chemical Offload

  • Fully automated
  • Low cost of ownership 
  • User-friendly HMIs 
  • Space efficient designs
  • Continuous transfer of chemical from tanks to the production
  • Full redundancy as required to maximize production uptime
  • Monitors and controls: 
    - Tanker offload functionality 
    - Tank levels during offloads and normal operation
chemical supply

Chemical Distribution

  • Bulk chemical systems
  • Single or multiple drum/tote systems
  • Tank systems (centrifugal and pneumatic)
  • Pressure vessel systems
  • Mobile delivery systems
chemical supply

In-line Blending

Exentec’s patented on-demand in-line chemical blending and supply of chemical solutions technology accounts for on-demand dynamic change in flow rates by the end-users or points-of-use while maintaining precise blend accuracy.

chemical supply

Chemical Generation

With Exentec’s integrated NH4OH on-site chemical generation technology, semiconductor fabs can significantly:

 

  • Reduce their overall chemical supply costs
  • Increase quality
  • Harden resiliency against supply-chain disruptions
  • Improve ecological sustainability
chemical supply

CMP Slurry Blending & Delivery

Remove expensive labor-intensive offline metrologies and manual process adjustments. Exentec has successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor CMP slurry solution in blend and distribution operations.

Cleanroom Facility
Cleanroom

Superior solutions and comprehensive services

mini environments
Mini Environments
air-handling-unit2-dark
Air Handling Units
critical-subsystems-and-controlled-environments-hero-image-dark2
Critical Subsystems and Controlled Environments
Intega-High Purity-Gas-Tech-and-Supply-Systems-Header-Section-dark
Gas Supply
chemical supply
Chemical Supply

Ultra-high purity chemical & slurry blending and distribution systems

NSI level sensor
Ampoules and Sensors
Process Exhaust
Process Exhaust