Exentec specializes in ultra-high purity chemical and gas systems for the semiconductor industry. Our portfolio includes blending and delivery equipment for a wide range of applications in aqueous chemicals and CMP slurries.
In addition, we provide the required field support services, controls, integration, and technical expertise to meet stringent semiconductor process control needs.
Our reliable systems offer:
- Advanced metrology-driven closed loop process control
- Automated chemical and slurry quality control
- Flexible, scalable and precise delivery and blending systems
- Increased process control via blend concentration and pressure control
- Seamless integration into SCADA with full I&C support
- Optimal floor space
- Maximum uptime
High Purity Chemical Systems
Exentec offers equipment, field support service and technical expertise to meet various application needs of high purity fluid delivery, chemical blending and state-of-the-art CMP slurry systems for semiconductor manufacturing and other high-tech industries.
Chemical Offload
- Fully automated
- Low cost of ownership
- User-friendly HMIs
- Space efficient designs
- Continuous transfer of chemical from tanks to the production
- Full redundancy as required to maximize production uptime
- Monitors and controls:
- Tanker offload functionality
- Tank levels during offloads and normal operation
Chemical Distribution
- Bulk chemical systems
- Single or multiple drum/tote systems
- Tank systems (centrifugal and pneumatic)
- Pressure vessel systems
- Mobile delivery systems
In-line Blending
Exentec’s patented on-demand in-line chemical blending and supply of chemical solutions technology accounts for on-demand dynamic change in flow rates by the end-users or points-of-use while maintaining precise blend accuracy.
Chemical Generation
With Exentec’s integrated NH4OH on-site chemical generation technology, semiconductor fabs can significantly:
- Reduce their overall chemical supply costs
- Increase quality
- Harden resiliency against supply-chain disruptions
- Improve ecological sustainability
CMP Slurry Blending & Delivery
Remove expensive labor-intensive offline metrologies and manual process adjustments. Exentec has successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor CMP slurry solution in blend and distribution operations.
Cleanroom
Superior solutions and comprehensive services
We develop, produce and maintain reliable cleanroom products and production environments for ultra-clean controlled atmospheres.
Mini Environments
In the battery market, Exentec pioneers a unique modular Mini Environment concept, integrating energy reduction and technological improvements.
Air Handling Units
Air Handling Units from Exentec are distinguished by energy-efficient design. Our research and development team works with state-of-the art equipment and always contributes the latest knowledge.
Critical Subsystems and Controlled Environments
Pure media supply systems for sensitive products
Chemical Supply
Ultra-high purity chemical & slurry blending and distribution systems
Ultra-high purity chemical & slurry blending and distribution systems
Ampoules and Sensors
We manufacture liquid level sensors, pyrophoric chemical handling and DOT 4B ampoules, cylinders and canisters widely used in the semiconductor, photovoltaic and battery industries.
Process Exhaust
We set the industry standard for safe and reliable corrosive fume exhaust duct systems