Cooling Water Cabinets

Cooling Water Cabinets

Usage of ultra-pure-water (UPW) in the tool circuit.

Precise Environmental Chamber

Precise Environmental Chamber

Precise environmental chamber for controlled process environments.

Precision Climate-Control System

Precision Climate-Control System

The right climate ensures quality and reduces the rejection rate in production.
Dew Point Control Solution

Dew Point Control Solution

System solution for the dew point control of critical humidity production.

Ultrapure Water Conditioning

Ultrapure Water Conditioning

Precise conditioning of fluid media at innovative production environments.

Cleanroom

Superior solutions and comprehensive services

Mini Environments
Air Handling Units
Critical Subsystems & Controlled Environments
Gas Supply
Chemical Supply

Ultra-high purity chemical & slurry blending and distribution systems

Ampoules and Sensors
Process Exhaust