High Purity Chemical Systems

High Purity Chemical Systems

Exentec offers equipment, field support service and technical expertise to meet various application needs of high purity fluid delivery, chemical blending and state-of-the-art CMP slurry systems for semiconductor manufacturing and other high-tech industries.

Chemical Offload

Chemical Offload

Providing continuous transfer of chemical from the main tanks to production distribution tanks with system and/or component redundancy to maximize production uptime.

Chemical Distribution

Chemical Distribution

Our chemical distribution systems improve processes, optimize floor space, minimize downtime and extend product life, lowering overall cost of ownership.

Chemical Generation

Chemical Generation

With Exentec’s integratedNH4OHon-site chemical generation technology, semiconductor fabs can significantly reduce their overall chemical supply costs, increase quality, harden resiliency against supply-chain disruptions, and improve ecological sustainability.

CMP Slurry Blending & Delivery

CMP Slurry Blending & Delivery

Remove expensive labor-intensive offline metrologies and manual process adjustments. Exentec has successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor CMP slurry solution in blend and distribution operations.

Cleanroom

Superior solutions and comprehensive services

Mini Environments
Air Handling Units
Critical Subsystems & Controlled Environments
Gas Supply
Chemical Supply

Ultra-high purity chemical & slurry blending and distribution systems

Ampoules and Sensors
Process Exhaust