AMC Filters
AMC Filters
Exentec is one of the pioneers in the development of AMC filters
A special challenge in highly clean production environments (i.e. semiconductor manufacturing) is removal of Airborne Molecular Contamination (AMC), such as acids, bases, condensables and dopants from the process air. These can lead to undesired chemical reactions on the wafer surface and process equipment. Being one of the pioneers in the development of AMC filters, Exentec offers a comprehensive variety of different filtration products for various application areas, like make-up air or return air filters for cleanroom ceilings or for tool and process protection.
The products are engineered in our in-house technology center and are qualified and optimized in all relevant aspects such as filter capacity (= max lifetime), highest removal efficiency (= max process protection), lowest pressure drop (= energy saving), lowest outgassing and particle development.
INX/PCF-ABCD
INX/PCF-ABCD with metal frame containing media combination for removal of all possible Airborne Molecular Contamination AMC’s. This combination of ion exchange media with impregnated activated carbon material merges the best of all filter technologies to remove the complete range of AMC within one filter housing. This combination filter enables high removal efficiency and a long useful filter lifetime.
R-PCF-CD
R-PCF-CD are compact filters for the treatment of Volatile Organic Compounds (VOC’s). This model of the PCF series is equipped with a massive amount of high-quality activated carbon medium, which leads to longest possible filter lifetime and high removal efficiencies even at low inlet concentrations. Therefore, it provides optimum protection for the critical processes of the semiconductor and flat panel industry. Due to the intelligent design the pressure drop is kept extremely low, which helps saving electricity cost.
INX-A
INX-A with metal frame containing various granular or fibrous ion-exchange media with anion-exchange medium for removal of acids. This leads to very high removal efficiency as well as an unmatched high capacity and thus to a long effective filter lifetime. The filter also features a very low pressure drop, which helps to keep energy costs low.
INX-B
INX-B with metal frame containing various granular or fibrous ion-exchange media with cation-exchange medium for removal of bases. This leads to very high removal efficiency as well as an unmatched high capacity and thus to a long effective filter lifetime. The filter also features a very low pressure drop, which helps to keep energy costs low.
CCF-CD
CCF-CD with polystyrene frame containing activated carbon media with highly activated carbon for removal of condensables resp. VOC’s.
CCF-ACD
CCF-ACD with polystyrene frame containing impregnated carbon media for removal of acids as well as condensables / VOC’s. This filter is a V-shaped filter with pleated, impregnated activated carbon material. It is characterized by low pressure drop and high adsorption and is used for the removal of acidic contaminants. The filter is fully incinerable.
CCF-ACD
