Cyclone XL

The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first abatement chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam. 

 
Beneficial Features

• High Flow Capacity: Up to 5000slm flow capacity without loss of efficiency - more than 5 times most POU systems
• Gas Inlet Devices: Ambient devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions 
• Packed Column: The final polish. Packing requires no maintenance or replacement 
• Second and Third Abatement Chambers: Eleven fine spray, high velocity nozzles ensure effective removal of impurities 
• First Abatement Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities
• Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam. Three flow stages to match process parameters
• Pump: Corrosion resistant, high-output and long life. Recirculates 25GPM
• Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use
• Small Footprint: 47.2 inches by 53.35 inches

 
Inlet Types
 

• Poly Etch CVD Inlet: Highly efficient gas abatement with patented gas inlet devices that minimize restrictions
• Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months
   

Inlet Configurations

• Standard Epitaxial: 1 port for Epitaxial
• Standard XL: 2 ports only, unheated only, KF 80, SS

To speak with us about our gas abatement solutions:

• +1 408.573.0701

For abatement parts orders or abatement order questions:

• orders-cp@exentec.net

For abatement technical support assistance:

• support-cp@exentec.net

For abatement Applications support assistance: 

• applications-cp@exentec.net