Vapor Delivery System
Vapor Delivery System
Exentec’s Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance
Exentec’s Vapor Delivery System is a compact, standalone solution for efficient and precise chemical vapor distribution. It includes a stainless steel bubbler vessel, optional integrated chiller, and system controller—all within a small footprint. Facility, carrier gas, and process connections can be configured from multiple sides for flexible installation.
System Overview:
- Carrier gas bubbles through liquid chemical in the vessel using a sparge diffuser for high vapor saturation
- Active linear level sensor maintains the setpoint liquid level
- Temperature control via probe and optional chiller ensures consistent vapor delivery
Enclosure Specifications:
- Size: 16” W x 16” D x 74.25” H with 3” exhaust
- Durable 11-gauge steel with corrosion-resistant coating
- Welded inner enclosure for chemical containment
- Louvers and rear plenum for effective gas evacuation
- Separate zones for electrical, chiller, and gas components
- Safety features: Exhaust sensor, UL sprinkler, rate-of-rise fire sensor, gasketed doors
Available Options:
- Bubbler sizes: 1, 5, 10, or 20 liters
- Integrated chiller
- Reclaim options: Manual or remote drain, reclaim line
- Carrier gas stick: Optional pressure gauge/transmitter, bypass, ESO valve
Exentec’s UHP bubbler vessels support high-performance vapor delivery in semiconductor, solar, and related advanced manufacturing processes such as ALD, PEALD, CVD, and epitaxy.
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Exentec's Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance.
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