Encompass is Exentec’s first thermal product line, developed by experienced specialists in wet abatement. The market-leading innovation combines active back flash suppression and wet wall burner technology. Revolutionary burner design and the pre-wet scrubbing chamber virtually eliminates burner maintenance and consumables.
Customers recognize that preprocessing abatement process gas streams allow them to maximize process tool uptime while also maintaining desired destruction rate efficiency. This lowers NOx by removing ammonia before the burner and minimizes particle formation in facilities' ductwork by removing precursors in the pre-wet abatement chamber.
Encompass product overview
Encompass product overview
• Independent pre-scrub chambers prevent mixing of incompatible gases
• Wet wall burn technology “encompasses” the thermal zone with recirculated water and corrosion resistant materials
• Chamber parts are protected from corrosion and deposits are prevented from forming retiring routine maintenance for the burner
• Multi-zone burner technology exploits existent process gases without diluting the main flame effecting DRE
• True “green mode” operation is obtainable by digital on and off cycles of the flame and resultant thermal profile
Encompass Benefits
Encompass Benefits
• W-CVD - WOx deposits created by burning WF6 CVD Nitride
• 90% reduction in NOx by wet scrubbing NH3 EPI
• Anti-back flash technology for flame suppression and pressure relief
• Lowest total cost of ownership is achieved by elimination of routine maintenance and consumables
• Highest return on net assets and overall equipment efficiency is achieved by superior uptime and availability
Encompass product overview
Encompass product overview
• Independent pre-scrub chambers prevent mixing of incompatible gases
• Wet wall burn technology “encompasses” the thermal zone with recirculated water and corrosion resistant materials
• Chamber parts are protected from corrosion and deposits are prevented from forming retiring routine maintenance for the burner
• Multi-zone burner technology exploits existent process gases without diluting the main flame effecting DRE
• True “green mode” operation is obtainable by digital on and off cycles of the flame and resultant thermal profile
Encompass Benefits
Encompass Benefits
• W-CVD - WOx deposits created by burning WF6 CVD Nitride
• 90% reduction in NOx by wet scrubbing NH3 EPI
• Anti-back flash technology for flame suppression and pressure relief
• Lowest total cost of ownership is achieved by elimination of routine maintenance and consumables
• Highest return on net assets and overall equipment efficiency is achieved by superior uptime and availability