Exentec is the supplier of choice for major semiconductor companies around the world, providing Point-of-Use (POU) gas abatement solutions for deposition, etch and diffusion process tools.
Our systems are some of the most efficient and reliable Epi scrubbers available. We combine inlet device technology with a PLC-based control box and automated gas inlet plunger to produce a low-maintenance Epi abatement system. This performance results in higher uptime, greater process stability and increased safety. Our systems combine 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry.
Encompass
This industry first Wet-Burn-Wet abatement system combines two wet abatement technologies (Wet + Burn/Wet) into a single platform, allowing for efficient removal of water-soluble gasses prior to the burner.
Cyclone
Exentec's Cyclone wet abatement system is our flagship model which includes all of the advanced features that support zero system-related process tool downtime.
Cyclone XL
Our newest high-capacity, high-efficiency wet abatement system, the Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.
Cleanroom
Superior solutions and comprehensive services
We develop, produce and maintain reliable cleanroom products and production environments for ultra-clean controlled atmospheres.
Mini Environments
In the battery market, Exentec pioneers a unique modular Mini Environment concept, integrating energy reduction and technological improvements.
Air Handling Units
Air Handling Units from Exentec are distinguished by energy-efficient design. Our research and development team works with state-of-the art equipment and always contributes the latest knowledge.
Critical Subsystems and Controlled Environments
Pure media supply systems for sensitive products
Chemical Supply
Ultra-high purity chemical & slurry blending and distribution systems
Ultra-high purity chemical & slurry blending and distribution systems
Ampoules and Sensors
We manufacture liquid level sensors, pyrophoric chemical handling and DOT 4B ampoules, cylinders and canisters widely used in the semiconductor, photovoltaic and battery industries.
Process Exhaust
We set the industry standard for safe and reliable corrosive fume exhaust duct systems