Exentec is the supplier of choice for major semiconductor companies around the world, providing Point-of-Use (POU) gas abatement solutions for deposition, etch and diffusion process tools.
Our systems are some of the most efficient and reliable Epi scrubbers available. We combine inlet device technology with a PLC-based control box and automated gas inlet plunger to produce a low-maintenance Epi abatement system. This performance results in higher uptime, greater process stability and increased safety. Our systems combine 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry.
To speak with us about our gas abatement solutions:
- +1 408.573.0701
For abatement parts orders or abatement order questions:
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For abatement Applications support assistance:
Encompass
This industry first Wet-Burn-Wet abatement system combines two wet abatement technologies (Wet + Burn/Wet) into a single platform, allowing for efficient removal of water-soluble gasses prior to the burner.
Cyclone
Exentec's Cyclone wet abatement system is our flagship model which includes all of the advanced features that support zero system-related process tool downtime.
Cyclone XL
Our newest high-capacity, high-efficiency wet abatement system, the Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.
Cleanroom & Dryroom
Exentec provides turnkey cleanroom technology and clean room products for high-tech industries
Exentec provides turnkey cleanroom technology for high-tech industries. We develop, produce and maintain cleanroom products and production environments for ultra-clean controlled atmospheres.
Media Supply
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Exhaust Abatement
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Installation Services
Installing complex process piping, mechanical and electrical systems for high-tech customers
Modular Solutions
Our OSM and smart modular product solutions bring process utilities to capital equipment and tool installations, saving valuable time and expense while improving quality, safety and serviceability.
Technical Facility Management
Exentec delivers more than just facility operations. We provide intelligent, scalable solutions that prioritize your most critical success factors
Exentec delivers more than just facility operations. We provide intelligent, scalable solutions that prioritize your most critical success factors.