High-purity chemical systems delivery for a smart power fab

Project overview

 

The project achieved on-time delivery of all systems and supported the on-time start-up of the first cleanroom production tools at a new semiconductor facility in Dresden. By successfully executing one of the most significant semiconductor equipment programmes in its history, Exentec demonstrated its ability to deliver large-scale, fast-track projects while supporting the successful ramp-up of advanced manufacturing operations

 

The challenge

 

As part of a multi-billion Euro investment in a new semiconductor facility in Dresden, Exentec's client required the delivery of 40 high-purity chemistry systems supporting acid, caustic and solvent distribution. The project demanded significant scaling of engineering, manufacturing and project resources to meet an aggressive fast-track programme, with all systems required within a 20-month delivery schedule.

 

Exentec's solution

 

Exentec engineered, designed, assembled and commissioned 40 high-purity chemistry lines for the new facility. To meet the programme requirements, the team expanded local production and project resources in Dresden, leveraging regional manufacturing capabilities while maintaining close coordination across engineering, fabrication and commissioning activities.

 

The results

 

This project represented the largest equipment project in the history of Exentec Germany. The scope included the delivery of 40 high-purity chemistry systems, supported by the manufacture of 60 storage and day tanks, 120 cabinets and 300 valve manifold boxes (VMBs) within a nine-month production cycle. The solution also incorporated parallel-operating centrifugal pumps to enhance operating reliability and maintain constant system pressure.