Precise Environmental Control Chamber

Precise Environmental Control Chamber
Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.
Advanced Technology Facilities
Innovation, sensitive production processes, increasing quality standards and fast progress in research and development present steady and growing challenges to production and development environments in the semiconductor and optical industries, as well as for nanotechnology and micromechanics.
Very low temperature and humidity tolerances, absolute cleanliness in regard to gaseous and particulate contamination, as well as the shielding of acoustic, vibrational and electromagnetic influences to the customer's processes are the key factors for optimum production processes. Our solution: the MEC System (Modular Environmental Chamber)
- Stable and reproduceable process environments
- Deposition of particulate and chemical contaminants
- Precise temperature control
- Acoustic shielding
Technical Data
Performance Parameters
- Air volume flow: 2.95 m³/h
- Air temperature: 22 °C
- Temperature stability: ± 5 mK down to ± 1 mK
- Humidity: 33 % r.H.
- Humidity stability: ± 0.3 % r.H.
- Acoustic shielding: for 100 < f < 5000 Hz: -15 dB
- Magnetic shielding for 10 < f < 200 Hz: -30 dB