Semiconductor equipment close-up

Equipment

  • Gas cabinets / VMBs / VMPs 
  • Chemical cabinets / VMBs / VMPs 
  • Analytical cabinets 
  • Gas mixing and metering systems 
  • Gas detection 
  • Container solutions 
  • Customised control systems for gas and chemical supply systems 
  • Exhaust gas cleaning systems 
  • Control and regulation systems 
  • Process visualisations 
  • Process fume exhaust systems 
  • Wet and Wet-Burn-Wet gas abatement systems 
semiconductor equipment installation

Installations

  • High-purity gas systems and machine connections (Hook-Up)
  • Chemical supply & disposal systems
  • Chemical cabinets
  • Chemical distribution systems
  • Filling stations
  • Plastic solutions for acids/alkalis
  • Stainless steel solutions for solvents
  • Vacuum systems
  • Fine chemical systems
  • Filter stations
OEM gas and refrigeration lines

OEM

  • Gas and refrigeration lines 
  • Pipe/bellows/valve assemblies with high purity gas compliant joining techniques 
  • Connecting components/distribution blocks 
  • Cable sets 
  • (Partially) automated gas mixing systems including monitoring and control of the gas flows 
  • Modular “Plug and Play” solutions 
  • EUV components for the vacuum sector 
process exhast module at osm facility

Off-Site Manufacturing

  • Large-scale modularization 
  • Custom process skids, racks and modules 
  • MEP services 
  • Virtual design and construction