Exentec specializes in ultra-high purity chemical and gas systems for the semiconductor industry. Our portfolio includes blending and delivery equipment for a wide range of applications in aqueous chemicals and CMP slurries.
In addition, we provide the required field support services, controls, integration, and technical expertise to meet stringent semiconductor process control needs.
Our reliable systems offer:
- Advanced metrology-driven closed loop process control
- Automated chemical and slurry quality control
- Flexible, scalable and precise delivery and blending systems
- Increased process control via blend concentration and pressure control
- Seamless integration into SCADA with full I&C support
- Optimal floor space
- Maximum uptime
High Purity Chemical Systems
Exentec offers equipment, field support service and technical expertise to meet various application needs of high purity fluid delivery, chemical blending and state-of-the-art CMP slurry systems for semiconductor manufacturing and other high-tech industries.
Chemical Offload
Providing continuous transfer of chemical from the main tanks to production distribution tanks with system and/or component redundancy to maximize production uptime.
Chemical Distribution
Our chemical distribution systems improve processes, optimize floor space, minimize downtime and extend product life, lowering overall cost of ownership.
In-line Blending
Exentec’s patented on-demand in-line chemical blending and supply of chemical solutions technology accounts for on-demand dynamic change in flow rates by the end-users or points-of-use while maintaining precise blend accuracy.
Chemical Generation
With Exentec’s integrated NH4OH on-site chemical generation technology, semiconductor fabs can significantly reduce their overall chemical supply costs, increase quality, harden resiliency against supply-chain disruptions, and improve ecological sustainability.
CMP Slurry Blending & Delivery
Remove expensive labor-intensive offline metrologies and manual process adjustments. Exentec has successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor CMP slurry solution in blend and distribution operations.
Cleanroom & Dryroom
Exentec delivers high-performance cleanroom and dryroom environments for advanced manufacturing, acting as a single accountable partner from design through installation and commissioning.
Exentec delivers high-performance cleanroom and dryroom environments, acting as a single accountable partner from design through installation and commissioning.
Media Supply
Exhaust & Abatement
Exentec delivers integrated exhaust and point-of-use abatement systems as part of end-to-end solutions for critical manufacturing environments. We ensure the safe, compliant, and reliable capture and treatment of process emissions from deposition, etch, and diffusion processes.
Installation Services
Installing complex process piping, mechanical and electrical systems for high-tech customers
Modular Solutions
Our OSM and smart modular product solutions bring process utilities to capital equipment and tool installations, saving valuable time and expense while improving quality, safety and serviceability.
Technical Facility Management
Exentec delivers more than just facility operations. We provide intelligent, scalable solutions that prioritize your most critical success factors
Exentec delivers more than just facility operations. We provide intelligent, scalable solutions that prioritize your most critical success factors.