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      gas abatement

      Cyclone

      Cyclone is Exentec's premier wet abatement system and includes a range of advanced features that allow Exentec to claim zero system related process tool downtime.
      Cyclone minimizes the rate of restriction and an automatic gas inlet plunger removes restrictions without process interruptions. The Cyclone’s Eductor Cone keeps exhaust line at slightly negative pressure (a nominal draw of 1-2 inches of water).
       
      Its first scrubbing chamber includes a coarse spray, with a high-flow nozzle coating the chamber to remove bulk impurities. A second scrubbing chamber follows with five fine sprays and high velocity nozzles to ensure effective removal of further impurities.

       

      To speak with us about our gas abatement solutions:

      • +1 408.573.0701

      For abatement parts orders or abatement order questions:

      • orders-cp@exentec.net

      For abatement technical support assistance:

      • support-cp@exentec.net

      For abatement Applications support assistance: 

      • applications-cp@exentec.net

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