Customized solutions from manual single-process benches to fully automated wafer handling systems
Exentec can customize substrate carriers and end effectors to accommodate unique processing requirements. We support a wide range of substrates and materials:
- Wafers (100mm – 300mm)
- III-V semiconductor materials
- Photomasks
- Glass and quartz fixtures
- Custom manifolds and specialty carriers
Our engineers can also design custom end effectors and substrate carriers to meet your specific process and handling needs.
- Cleaning, resist strips, etching, development, metal lift-off, IPA recovery and drying
- Usable for acid, base and solvent applications
- Single or multi-cassette bath sizes
Surface preparation systems are scalable and ready for integration into cleanrooms, R&D labs, and high-volume fabs.