Exentec

System Refurbishment

Exentec has unmatched expertise in refurbishing critical process equipment

Exentec designs and manufactures an extensive range of specialty products and facility support equipment to meet the needs of the semiconductor industry. We not only replace OEM equipment that is no longer functional, but often optimize it with our innovative in-house developments.

Thanks to our many years of experience, Exentec has knowledge of almost all tools and components that are used in our target industries. This is also reflected in the quality of our maintenance services. We perform system upgrades, supply and install spare parts, and help our customers keep all chemical and gas systems, CDA compressors and dryers operating at optimum efficiency.

Quartz Containers

MEGATHERM™ systems feature a seamless molded quartz inner tank that provides a low-contamination and particle-free environment, designed to resist stripping and silicon nitride etching.

Circulating Baths

Center Feed™ is the first circulating and filter bath for the semiconductor industry and is primarily used for HF, BOE and KOH applications but can be used with most acids.

Submersible Pumps

Exentec submersible pumps are designed exclusively to meet the semiconductor industry's stringent requirements for circulating, filtered etch modules. Our pumps are manufactured to remain contamination-free, ensuring trouble-free and efficient operation.

Temperature Regulators

Designed specifically for the semiconductor industry, the WHRV™ and WHO™ Temperature Controlled Circulators are used to control temperature in filtered etch modules and other chemical tanks where temperature stability and uniformity is critical.

Quick Tilt Dishwasher

MICROCLEEN™ Quick Tilt Rinses feature adjustable top spray rails, external bottom fill rails and a larger dump door that allows dumping in seconds. They are capable of field retrofit without the need for any modifications to the existing plumbing system.

Pump Stations

Our Chemblast™ series of pumping stations are designed for situations where AWN is not available or the process tool is not close to the AWN. The pump stations collect the used chemistry from a special tool and then pump it to the AWN or to a collection point.

Bottle Washing Stations

The Exentec Standard Bottle Washing Station is designed to clean and house up to 8, one-gallon bottles. The washing station consists of two independent horizontal floor spray rails with 4 vertical spray towers to assist in moving the bottles.

Bottle Trolleys

Bottle trolleys are essential in active work areas where a handy and safe means of transporting bottled chemicals is required. Various configurations are available in addition to the popular 12 or 16 bottle 1 gallon bottle cart.

Exsiccator Cabinets

When moisture-sensitive equipment needs a protected environment, Exentec desiccator shelving and storage cabinets are indispensable. The internal environment of the desiccator cabinets can be monitored and/or controlled by various types of air or gas injection systems and control instruments.

Laboratory Glove Boxes

Glove boxes and other containment chambers are available in custom designs to fit any application and budget. The goal of the laboratory glove box is to isolate and separate the operator from the equipment in the controlled environment of the glove box.

Quartz Cleaning Systems

KINETICS offers specialty quartz tube cleaning systems for thorough cleaning of the inside and outside of the tube surface of diffusion tubes and similar quartz products. Various lengths and diameters of quartz tubing are placed in a cleaning chamber that rotates the tubing while injecting acids or other cleaning liquids.

Steel Work Tables

Exentec offers custom configured steel work tables at competitive prices. In addition to the popular stainless steel tables, cabinets can be chosen in any desired size and with different types of surface materials.