Our tools integrate process hardware, advanced control software, and automated robotics to deliver customized solutions from manual single-process benches to fully automated wafer handling systems.We can customize substrate carriers and end effectors to accommodate unique processing requirements.

We support a wide range of substrates and materials:

Wafers (100mm – 300mm)
III-V semiconductor materials
Photomasks
Glass and quartz fixtures
Custom manifolds and specialty carriers

Our engineers can also design custom end effectors and substrate carriers to meet your specific process and handling needs.

Cleaning, resist strips, etching, development, metal lift-off, IPA recovery and drying
Usable for acid, base and solvent applications
Single or multi-cassette bath sizes
Configurable and scalable process equipment.

Our team has experience with a wide range of application needs including work in FEOL, BEOL, Advanced Packaging, MEMS Pattern Plating, Magnetic Deposition, Electro-Etch, and E-less Deposition. We also have standard wet process bath layouts available for many applications such as:

Wet Etching – Silicon (KOH) etch, Nitride etch, buffered oxide etch, photoresist strip, and gold/platinum etch.
Metal Lift-Off – NMP and DMSO configurations
Wafer Clean – Support for HF, Piranha, SC1, SC2 baths

Our process tools can be configured with a complete range of support systems to enhance automation, safety, and chemical management:

Chemical Handling Systems
Chemical carts for dispense, removal, and storage
Onboard carboys for waste collection
Lift stations for waste neutralization
Process Optimization Hardware
Temperature-controlled circulators (WHRV)
Heating: up to 5115 BTU/hr
Cooling: up to 2550 BTU/hr
Recirculating baths for consistent temperature and flow
Quartz tanks for chemical resistance
Quick Dump Rinsers (QDR)
Immersion, cascade, and spray modes

Our surface preparation systems are scalable and ready for integration into cleanrooms, R&D labs, and high-volume fabs. Whether you're working with standard substrates or unique materials, our team can deliver a process-ready platform tailored to your needs.