Air Quality Monitoring

Air Quality Monitoring
Contamination detection, air control and monitoring for health and safety
Air Quality Monitoring
Complex and special manufacturing processes in electronic and semiconductor industries require high cleanliness of ambient air. Chemical gas-phase contaminations, so-called airborne molecular contaminants (AMC), can form thin chemical films on critical surfaces. Stringent monitoring of indoor air quality enables to comply with high technology production environments.
Exentec provides expertise in measuring, identifying and controlling air contamination. This enables our customers to improve their manufacturing processes as well as their product yields.
The control of air in new cleanrooms and routine monitoring during the production process are essential tasks, in all fields where clean environments for production are required: semiconductor industry, optical and laser technology, pharmaceutical industry, medical technology, life science and food.
Our portfolio includes:
- Air sampling indoors, within makeup air units, recirculation systems, in mini environments and tools
- Careful selection of the sampling points for root cause analysis if higher level of contamination is detected
- Choice of appropriate sampling method
- Assessment of purification measures (chemical filters)
- Evaluation according to current international technology and customer specifications
Quality Control of Gaseous Media
Pure gases are used in many fabrication processes in the semiconductor, LED, flat panel and optical industry. They are used as purging gases for cleaning and setting up inert atmospheres, dilution and carrier gas, reaction gases and pneumatic drives. For most processes pure and ultrapure qualities are required.
Avoiding disastrous effects on product quality and process flow, high purity gases should be continuously analyzed and monitored.
Therefore, we offer:
- Analysis of clean dry air (CDA), N2, He, Ar, CO2 and others
- Advanced sampling procedure to handle higher pressure and flow
- Sample collection of acids and bases by impinger method for ions chromatography (IC) and mass spectrometry (ICP-MS) analysis
- Sample collection of organic compounds and refractories by sampling with adsorption materials (e.g. Tenax, CarboTrap) and TD-GC/MS analysis