
Our trace analysis area has in-depth knowledge in the field of air and water analyses for clean environments. Many years of experience with chemical contamination analysis make our trace analysis team a competent partner in terms of cleanliness investigations. State-of-the-art analytical equipment combined with approved and validated analytical procedures ensure reproducible and reliable analytical results.
A high-quality control of processes and outcomes is guaranteed to our customers due to our ISO 9001 certification. Moreover, our complete quality management system ensures maximum transparency. In this regard, our customers appreciate our reliable analyses as well as our excellent services.
- Total trace analysis: 470 m²
- Team: Chemists, laboratory assistants and technicians
- Available cleanroom space up to ISO class 5
- Ultra - trace analysis from ppb to sub-ppt range
- Particle detection in air and liquids

Service Overview
- Total Organic Carbon (TOC) analyzer provides continuous monitoring of organics in ultrapure water.
- Chemical Trace- Analysis for Metals and Ions via ion chromatography is applied if the concentration of ionic species (anions, cations) in water is in focus.
- Inductively Coupled Plasma Mass Spectrometry (ICP-MS) can detect almost all elements of the periodic table.
- Ion Chromatography (IC) is the ideal method for analyzing anions, cations and other polar substances in aqueous media.
- Laser Particle Measurement can count and size particles as low as 0.1 μm in air and 50 nm in water respectively.

Ultrapure Water Measuring
The semiconductor industry requires increasingly stringent tolerance limits for contaminants in ultrapure water, especially for critical metals and TOC. Our services include:
- Test of water quality in a process tool or mini environment for UPW conditioning
- Testing the water quality in the overall system from point of entry (POE) to point of use (POU)
- Controlling water quality at several transfer points
- Pre-qualification of UHP polymer materials (tubes, hoses, membranes etc.)
- Validation of ion exchange resins and filter systems

Air Quality Monitoring
Complex and special manufacturing processes in electronic and semiconductor industries require high cleanliness of ambient air. Chemical gas-phase contaminations and airborne molecular contaminants can form thin chemical films on critical surfaces. Stringent monitoring of indoor air quality enables to comply with high technology production environments.
Therefore, we offer:
- Analysis of clean dry air, N2, He, Ar, CO2 and others
- Advanced sampling procedure to handle higher pressure and flow
- Sample collection of acids and bases by impinger method
- Sample collection of organic compounds and refractories

Chemical Filter Testing
Filters are used in a variety of applications for contamination control of ambient and circulating air to remove acidic, basic and organic substances. Exentec offers comprehensive testing of chemical filter materials that must meet the highest quality requirements. We are equipped with test rigs and air handling units and can simulate relevant cleanroom contaminations (SO2, H2S, NH3, NOX, TMB, ozone, etc.)
- Testing of filter materials such as modified charcoal, ion exchange raisins, modified inorganic adsorbent materials
- Online measurement devices as well as impinger method and adsorbent tubes

Material Outgassing
Sources of organic outgassing seals, circuit boards, cable insulation, cleaning agents, coatings, resins and others. Critical compounds are siloxanes, aromatic amines and high boiling aromatic hydrocarbons like phthalates.
The product and process control includes:
- Component and material testing for production control
- Screening analysis of organic compounds by thermal desorption
- Analysis of total VOC
- Evaluation of low, medium and high boiling organic compounds
- Issuing of Exentec certificates

Technology Center
The Technology Center offers a wide range of services. E.g. Development & Engineering and Approval & Qualification.